Design of MEMS Oscillator for High Frequency Application

MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performance. The proposed CMOS-MEMS oscillator is capable of generating 19.8 MHz clocks. The beam resonators require approximately 35 VDC and 400mV, VAC to vibrate. The operational amplifier achieves a gain of 26dB at VDD of 1.8v and VSS of -1.8v. For this project, the MEMS based Oscillator circuit was elected due to its quality and high frequency stability. The Micro Electro Mechanical System beam resonator translates to motional resistance of Rm=2.8MΩ, capacitance, Cm=2.46aF and inductance, Lm=13.6H respectively. The MEMS based Oscillator was simulated and measured using Cadence virtuoso to obtain the desired design parameters.